Automation in R&D: Complying with contradictory constraints of seemingly incompatible worlds
The CEA-Leti is one of the 3 European RTOs in semi-conductor manufacturing. Being an R&D center and not a production fab raises specific challenges to bringing automation into the shop floor.
Automation is based on reproducible processes and work methodologies, whereas R&D needs high versatility and adaptability during process steps. For example, very advanced process steps do not allow giving a precise recipe in the MES, but merely and integration scheme. The engineers on the shop floor will prepare a new recipe to realize the target integration.
At first sight, automation and very advanced R&D seem incompatible. The presentation will focus on the solutions that have been deployed in the CEA-Leti clean rooms to tackle this incompatibility.
After a short history of the automation project at CEA-Leti, the specific solutions both for automation development, and use on the shop floor, will be detailed.