Dr. Martin Sczyrba
Senior Member of Technical Staff Product Development
Advanced Mask Technology Center (AMTC)
Photomask technology "Moore and More than Moore"
In its 20 years of production the AMTC has successfully driven technological development to enable manufacturing of photomasks to the most advanced technology nodes.
This technology, in parallel, is also applied to manufacture optical products and imprint masters for emerging markets.
Both types of products require a variety of different aspects of manufacturing process automation. This talk will examine 2 innovative examples and their realization.