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Alexander Grosser

Manager Silicon Foundry
BOSCH Reutlingen

An eclipse IoT solution for in-situ sensor integration in a wafer fab

Equipment data processing plays a major role to achieve a high fab yield in a semiconductor fab. The integration of external sensors in a retrofit tool poses a challenge to complete the overall data set within the Equipment Integration (EI) and the Manufacturing Execution System (MES). Often, one can find single solutions with locked data, lacking interoperability.

We present an example for the integration of external flow sensors in a Lithography coater tool. Our Ecplise IoT solution is able to capture, process and store the sensor data, providing easy data access.

The work presented in this paper is part of the JU-ECSEL project Arrowhead Tools.

About Alexander Grosser

Alexander has been working in the semiconductor industry over 18 years in several positions as engineer, manager and project manager. He has a strong passion for standardization, optimization and automatization. During his time at Bosch, Alexander worked as a project manager in the areas of maintenance optimization, I4.0 funded projects and portfolio management.

Prior to his project manager positions at Robert Bosch, Alexander worked for Globalfoundries, Sematech and AMD in the field of industrial engineering simulations and diffusion.

Alexander has a university degree in Electrical engineering from university of applied science Gießen-Friedberg and a MBA from HWR Berlin. As a hobby, Alexander supports DAV Reutlingen for a better, more green energy supply at his refuge in the Alps.