Breakout: Automated Reticle Logistics – From Concept to Implementation

This session provides a comprehensive view on automated reticle logistics, covering the full journey from conceptual considerations to practical implementation. It starts with the fundamentals of reticle handling, highlighting their critical role in lithography and the key challenges associated with automation.

Building on this foundation, the session explores concrete technical solutions for automated storage, transport, and handling systems, supported by digital validation methods such as simulation.

Finally, the session addresses intelligent reticle scheduling as an essential element for ensuring availability and maximizing fab performance. By combining physical automation with digital planning and control, the session demonstrates how integrated reticle logistics can be realized in modern semiconductor fabs.

The presentations offer both strategic insights and practical guidance for engineers and decision-makers.