AND Breakout-Sessions
Breakout: Equipment Integration: Requirements and Effort compared to Benefits
How can Fabs make Life easier for OEMs so that Fabs get what they need?
Equipment Integration is a key enabler of automation and productivity in the Semiconductor Industry. To ensure interoperability and scalability, SEMI Standards such as SECS/GEM, GEM300, and Equipment Data Acquisition (EDA) are widely adopted. SECS/GEM establishes the fundamental communication model between equipment and factory systems, GEM300 extends this model for 300 mm Automated Fabs with standardized material handling and control functions, and EDA enables high-speed, data-rich access to equipment information for advanced control and analytics.
Based on these standards, an Automation Capability Management (ACM) process is used to define, implement, and validate equipment functionalities throughout the Integration Lifecycle. This process includes Capability Definition aligned with Factory Requirements, Standards-Compliant Implementation, Structured Verification and Compliance Testing, and Controlled Deployment into Production.
Within the Breakout Session, a short introduction to the relevant SEMI Standards and the ACM Process will be given. Infineon and Bosch will outline their requirements, experiences, and challenges with Equipment Integration by following the ACM Process. In particular, the challenges will be presented. Kontron AIS, as an Integrator for various Machine Suppliers, will outline their experiences and challenges from the opposite direction. In a subsequent discussion, different perspectives will be discussed and solutions sought.