Presentation
Next Level of Automation for our R&D Pilot Line: Load & Go Operations
imec provides semiconductor R&D services on a global scale including wafer processing in its own Fab facilities. To ensure scalability of cleanroom operations while keeping up with increasing needs for data and contextualization, the Load & Go automation program has been launched. Load & Go will identify carriers which are expected from equipment perspective and start processing without further MES interaction required, thus enabling delivery by less trained operators or even AMHS equipment.
Systema EIA has been chosen as equipment integration platform by imec and currently is being piloted to introduce Load & Go operations.